Probe Station
CL-6 middle-sized probe station
Modular design, precise screw drive structure, up to 8 inch wafer, upgradable for RF test, high current test and laser repair applications.
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CL-4 | 4~8" middle-sized for basic I-V/C-V test



Features/ Aplications


For I-V/C-V, PIV, optoelectronic test


Up to 8 inch wafer


Precise screw drive structure, linear movement


Compatible with high magnification metalloscope, fine-tuning movement


Capable to be upgraded for RF test, high current test and laser repair applications


探针台,晶圆测试探针台



Specifications


Chuck Stage

Model

CL-4/CL-6/CL-8

Chuck size

4"/ 6" /8"

Rotation range

360° with angle locking, fine-tuning for 15° with 0.1° resolution

X-Y travel range

4"*4"/6"*6"/8"*8"

X-Y travel resolution

10μm/2μm/0.7μm/0.5μm

Z travel range

10mm

Sample mounting type

Vacuum

Chuck capacity

Up to 6 micropositioners

Electrical design

Electrical floating on chuck back, can be used as gate electrode

Dimension

400mmL*400mmW*600mmH/580mmL*480mmW*600mmH


Optical sytem

Microscope

Single tube microscope /stereo microscope / metalloscope

Magnification

16X-200X/20X-4000X

Travel range

X-Y up to 2"*2", vertical to 50.8mm

Camera

CCD Camera


Micropositioner

X-Y-Z travel range

12mm-12mm-12mm

Mounting mode

Magnetic/vacuum

Resolution

10μm/2μm/0.7μm/0.5μm upon request

Leakage current

10pA / 100fA

Cable adaptor

BNC/Banana head/Crocodile clip/Coaxial/Triaxial upon request

Probe tip diameter

0.2μm/1μm/2μm/5μm/10μm/20μm upon request

Probe metal

Tungsten/Beryllium copper upon request


Optional accessories

Hot chuck

Shielding box

Display screen

Gold plated Chuck

Special adapter

Vibration free table

RF test accessoriess


Notice:

Probe stations can be customized to customer requirements.

Specifications and designs are subject to change without notice.




All Rights Reserved. Shenzhen Cindbest Technology Co., Ltd


Shenzhen Cindbest Technology Co., Ltd

Add: 8F Weihuada Industrial Park No.5 Lirong Rd Xinshi Com Dalang St Longhua Dist Shenzhen,China

Tel: 0755-29412885

E-mail: aldrich@cindbest.com; francowang@cindbest.com






产品规格书:下载


Product Specifications:Download








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