CSA-8 automatic alignment probe station

Measuring type: 3 inch, 4 inch

Test silicon wafer unit size: 20—200 mil

Positioning accuracy: ≤ ± 0.01mm / 110mm

Automatic alignment accuracy: ± 0.01mm

Mistest rate: ≤ 1 ‰

Automatic registration time: ≤ 15 s

Test speed 45 mil 5.0 pcs / s

50 mil 4.6 pcs / s

87 mil 4.2 pcs / s

Step resolution: 0.001

Z direction travel: 0 ～ 5mm adjustable

Turning angle θ of the stage: ± 20o

CSA-8 type automatic alignment probe station can The automatic alignment test on the wafer is easy to operate. Fast, high test accuracy, with MAP display function can. It can be completed automatically after connecting with the tester Test and function of electrical parameters of various transistor cores Test.
Operation method CSA-8 type automatic alignment probe station Provides a clear and intuitive touch screen operation page, Automatic touch of the wafer can be completed by touch Bit test. 机器软件的操作界面	In addition, a more concise party is provided. Convenient keypad operation mode, the operator can Personal preferences and habits choose any kind of operation. 功能小键盘
Machine function With automatic scanning registration function, registration accuracy High and fast, Windows7 interface, dynamic map The figure shows the test process.	With circular test, range retest, edge detection Test, range dot, recycling test, rectangle Test and offline test multiple test functions.
With X, Y, Z three-axis motion structure, soft operation It can accurately compensate the verticality and flatness. Prove the machine's control accuracy and work stability.	With real-time RBI, offline RBI and lag After RBI function. New type of marking device, in use Time is up to 3 days, no ink is dripped, and 60% of operation time is saved.
With Z-axis stroke segmented motion function, its Divided into basic height, contact height, contact buffer, Overshoot and foldback height with edge detection Function to prevent probe-to-chip during test Scratches and poor contact between the probe and the chip.	Test pin mark ratio picture (reflective white point is pin mark) Multiple cores                         Single core