Probe Station
CH-12 large-sized comprehensive probe station

Modular design, seamless upgrade, up to 12 inch wafer, high precise screw drive structure, linear movement, quick and fine-tuning lift function for chuck stage, capable for Wafer test, PCB/IC test, RF test, high voltage and current test.






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CH-12 |8~12" large-sized comprehensive probe station


FEATURES / APPLICATION



◆ Up to 12 inch wafer


◆ High precise screw drive structure, linear movement


◆ Quick and fine-tuning lift function for chuck stage


◆ Compatible with multiple types of microscope


◆ Capable for Wafer test, PCB/IC test, RF test, high voltage and current test


◆ Modular design, seamless upgrade






Specifications


Chuck stage

Model

CH-12

Chuck size

8"/12" upon request

Rotation angle

360°with angle locking, fine-tuning for 15° with 0.1μm resolution

X-Y travel range

8"*8"/12"*12" upon request

X-Y travel resolution

10μm/1μm

Sample holding mode

Vacuum adsorption

Chuck capacity

U shape, up to 10 micropositioners

Stage lift ability

6mm-quick lift /25mm fine tuning

Electrical design

Chuck back is electrical floating, can be used as gate electrode

Dimension

840(L)*600(W)*700mmH/950(L)*700(W)*700mm(H)

Weight

100KG/150KG


Stereo Microscope

Model

Single tube microscope /stereo microscope /metalloscope

Magnification

16X-200X/20X-4000X

Travel range

X-Y up to 2"*2", vertical to 50.8mm

CCD Camera

CCD Camera

CCD Pixel

200W Pixel / 500W Pixel /1200W Pixel


Micropositioner

X-Y-Z Moving range

12mm-12mm-12mm

Resolution

10um / 2um / 0.7um/0.5um

Adsorption mode

Magnetic/vacuum

Cable

Coaxial / triaxial

Leakage current

10pA/100fA/10fA upon request

Cable connector

Banana head /Crocodile clip /Coaxial /Triaxial

Probe tip diameter

0.2um/1um/2um/5um/10um/20um upon request

Probe metal

Tungsten/Beryllium copper upon request


Optional accessories

Hot chuck

Display screen

Laser system

RF testing accessoriess

Shield box

Probe card holder

Optical platform

Gold-plated chuck

High voltage test accessories


Specifications and designs are subject to change without notice.




All Rights Reserved. Shenzhen Cindbest Technology Co., Ltd


Shenzhen Cindbest Technology Co., Ltd

Add: 8F Weihuada Industrial Park No.5 Lirong Rd Xinshi Com Dalang St Longhua Dist Shenzhen,China

Tel: 0755-29412885

E-mail: aldrich@cindbest.com;




产品规格书:下载


Product Specifications:Download






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